A Novel Stiff Membrane Seesaw Type RF Microelectromechanical System DC Contact Switch on Quartz Substrate
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Transactions on Electrical and Electronic Materials
سال: 2013
ISSN: 1229-7607
DOI: 10.4313/teem.2013.14.3.116